SSLEEC Installs Matheson Tri-Gas Reactor for UVC LED Development

Matheson Tri-Gas reported that the University of California Santa Barbara’s Solid State Lighting & Energy Electronics Center (SSLEEC) installed the SR-4000HT grade gallium nitride (GaN) metal organic chemical vapor deposition (MOCVD) reactor.
SSLEEC reportedly plans to use the reactor from Matheson Tri-Gas to continue developing UVC LEDs. Professor Steven DenBaars and Nobel Prize-winning Professor Shuji Nakamura co-direct SSLEEC. According to Matheson Tri-Gas, the SR-4000HT operates at over 40kPa of pressure and elevated temperatures. The reactor aids in growing high-aluminum-content devices at high growth rates.

According to Professor Nakamura, “We have already obtained preliminary growth results which demonstrate the unrivaled performance of the SR-4000HT reactor. Our students and faculty members are very excited by these results.  We look forward to using the MOCVD reactor from TNSC to grow the high-quality III-Nitride-based materials and devices.”

Koh Matsumoto, (CSE Division Manager, TNSC) stated, “We are proud that UCSB has chosen our reactor for their advanced research. We believe that the designed features of our reactor, which enable well-controlled vapor phase reactions, will allow UCSB to enjoy a large process window to develop their devices.”